ozi

A na-akpọkwa teknụzụ igbutu waya diamond dị ka teknụzụ ịcha abrasive.Ọ bụ iji electroplating ma ọ bụ resin bonding usoro nke diamond abrasive consolidated n'elu nke ígwè waya, diamond waya ozugbo eme n'elu silicon mkpanaka ma ọ bụ silicon ingot na-emepụta egweri, iji nweta mmetụta nke ịcha.Ịcha waya diamond nwere njiri mara ngwa ngwa igbutu ngwa ngwa, ịdị elu ịcha oke na ọnwụ ihe dị ala.

Ka ọ dị ugbu a, a nabatala otu ahịa kristal maka waya diamond ịkpụ silicon wafer, mana o zutekwara na usoro nkwalite, n'ime nke velvet ọcha bụ nsogbu kachasị.N'ihi nke a, akwụkwọ a lekwasịrị anya n'otu a ga-esi gbochie waya diamond ịcha monocrystalline silicon wafer velvet white problem.

Usoro ihicha nke waya diamond ịcha monocrystalline silicon wafer bụ iwepu silicon wafer nke igwe igwe na-egbutu waya na efere resin, wepụ eriri roba, wee hichaa wafer silicon.Akụrụngwa ihicha bụ tumadi igwe na-ehicha ihe (igwe degumming) na igwe nhicha.Isi usoro ihicha nke igwe na-ehicha ihe mbụ bụ: nri-spray-spray-ultrasonic cleansing-degumming-clean water rinsing-underfeeding.Isi usoro nhicha nke igwe na-ehicha ihe bụ: nri-mmiri dị ọcha na-ekpochapụ-mmiri mmiri dị ọcha na-ekpochapụ-alkali ịsacha-alkali ịsacha mmiri dị ọcha na-ekpochapụ mmiri dị ọcha na-ekpochapụ-mmiri mmiri dị ọcha-pre-dehydration (na-ebuli ngwa ngwa) - ihicha nri.

Ụkpụrụ nke ime otu-kristal velvet

Monocrystalline silicon wafer bụ njirimara nke corrosion anisotropic corrosion nke monocrystalline silicon wafer.Ụkpụrụ mmeghachi omume bụ nhazi mmeghachi omume kemịkalụ ndị a:

Si + 2NaOH + H2O = Na2SiO3 + 2H2↑

N'ezie, usoro nhazi nke suede bụ: NaOH ngwọta maka ọnụọgụ corrosion dị iche iche nke elu kristal dị iche iche, (100) ọsọ corrosion elu karịa (111), ya mere (100) na monocrystalline silicon wafer mgbe corrosion anisotropic gasịrị, emecha kpụrụ n'elu maka. (111) cone nwere akụkụ anọ, ya bụ usoro “pyramid” (dị ka egosiri na foto 1).Mgbe emechara ihe owuwu ahụ, mgbe ọkụ na-adaba na mkpọda pyramid n'akụkụ ụfọdụ, ọkụ ga-egosipụta na mkpọda n'akụkụ akụkụ ọzọ, na-eme ka nnabata nke abụọ ma ọ bụ karịa, si otú a na-ebelata nlegharị anya n'elu nke silicon wafer. , ya bụ, mmetụta ọnyà ọkụ (lee foto 2).Ka mma na nha na ịdị n'otu nke ihe owuwu "pyramid" ahụ, ka mmetụta ọnyà na-apụta ìhè karị, na-ebelata elu emitrate nke silicon wafer.

Ọgụgụ 1: Micromorphology nke monocrystalline silicon wafer mgbe mmepụta alkali gasịrị

Ọgụgụ 2: Ụkpụrụ ọnyà ọkụ nke usoro "pyramid" ahụ

Nyocha nke otu ọcha kristal

Site n'inyocha microscope eletrọn na silicon wafer na-acha ọcha, achọpụtara na etoliteghị pyramid microstructure nke wafer na-acha ọcha na mpaghara ahụ, ọ dịkwa ka ọ nwere akwa akwa nke ihe fọdụrụ "waxy", ebe usoro pyramid nke suede. na mpaghara ọcha nke otu silicon wafer ka kpụrụ mma (lee foto 3).Ọ bụrụ na e nwere residues n'elu monocrystalline silicon wafer, n'elu ga-enwe ihe fọdụrụ ebe "pyramid" Ọdịdị size na uniformity ọgbọ na mmetụta nke nkịtị ebe bụ ezughi oke, n'ihi na ihe fọdụrụ velvet n'elu reflectivity bụ elu karịa nkịtị ebe, na ebe nwere elu reflectivity tụnyere ndị nkịtị ebe na visual na-egosipụta dị ka ọcha.Dị ka a pụrụ ịhụ site na nkesa nkesa nke ebe na-acha ọcha, ọ bụghị mgbe niile ma ọ bụ na-emekarị na nnukwu mpaghara, ma ọ bụ naanị na mpaghara mpaghara.O kwesịrị ịbụ na a na-ehichaghị ihe ndị na-emetọ mpaghara n'elu nke silicon wafer, ma ọ bụ ọnọdụ elu nke silicon wafer na-akpata site na mmetọ nke abụọ.

Ọgụgụ 3: Ntụle nke ọdịiche microstructure mpaghara na velvet white silicon wafers

Elu nke waya diamond na-egbutu silicon wafer na-adịkwu ire ụtọ na mmebi ahụ dị ntakịrị (dị ka egosiri na foto 4).Tụnyere na ngwa agha silicon wafer, mmeghachi omume ọsọ nke alkali na diamond waya ịkpụ silicon wafer elu bụ nwayọọ karịa nke ngwa agha ọnwụ monocrystalline silicon wafer, otú mmetụta nke elu residues na velvet mmetụta bụ ihe doro anya.

Onyonyo 4: (A) N'elu micrograph nke ngwa agha bee silicon wafer (B) elu micrograph nke diamond waya bee silicon wafer.

Isi ihe fọdụrụnụ nke waya diamond e gbuturu silịkọn wafer elu

(1) Coolant: isi akụrụngwa nke diamond waya ọnwụ coolant bụ surfactant, dispersant, defamagent na mmiri na ndị ọzọ components.Mmiri mmiri na-egbutu na arụmọrụ magburu onwe ya nwere ezigbo nkwusioru, mgbasa ozi na ike ihicha dị mfe.Surfactants na-enwekarị mma hydrophilic Njirimara, nke dị mfe ihicha na silicon wafer ihicha usoro.Na-aga n'ihu na-akpali akpali na mgbasa nke ihe mgbakwunye ndị a na mmiri ga-emepụta ọnụ ọgụgụ buru ibu nke ụfụfụ, na-akpata mbelata nke coolant eruba, na-emetụta obi jụrụ arụmọrụ, na oké ụfụfụ na ọbụna ụfụfụ tojupụtara nsogbu, nke ga-akpa ike na-emetụta ojiji.Ya mere, a na-ejikarị onye na-ekpo ọkụ na-eme ihe na-ekpochapụ ụfụfụ.Iji hụ na arụrụ arụrụ arụ, silicone na polyether ọdịnala na-abụkarị hydrophilic dara ogbenye.Ihe mgbaze dị na mmiri dị nnọọ mfe ịgbasa ma nọgide na-adị n'elu silicon wafer na-esote ihicha, na-akpata nsogbu nke ọcha ntụpọ.Na ọ bụghị nke ọma dakọtara na isi mmiri nke coolant, Ya mere, ọ ga-mere n'ime abụọ mmiri, Main components na defoaming mmadụ e kwukwara na mmiri, Na usoro nke ojiji, dị ka ụfụfụ ọnọdụ, enweghị ike quantitatively ịchịkwa ojiji na onunu ogwu nke antifoam agents, Nwere ike ikwe ka ịdoụbiga mmanya ókè nke ndị na-eme ihe na-adịghị mma, na-eduga n'ịba ụba na silicon wafer n'elu residues, Ọ dịkwa mfe iji rụọ ọrụ, Otú ọ dị, n'ihi ọnụ ala dị ala nke akụrụngwa na onye na-eme ihe na-adịghị mma. ihe, Ya mere, ọtụtụ n'ime ụlọ coolant niile na-eji usoro a usoro;Ọzọ coolant na-eji ọhụrụ defoaming gị n'ụlọnga, nwere ike na-mma dakọtara na isi components, Ọ dịghị mgbakwunye, nwere ike n'ụzọ dị irè na quantitatively ịchịkwa ya ego, nwere ike n'ụzọ dị irè gbochie oké ojiji, The omume dịkwa nnọọ adaba ime, na kwesịrị ekwesị ihicha usoro, Ya. Enwere ike ịchịkwa ihe ndị fọdụrụ na ọkwa dị ala, Na Japan na ndị na-emepụta ụlọ ole na ole na-agbaso usoro usoro a, Otú ọ dị, n'ihi ọnụ ahịa ihe onwunwe dị elu, uru ọnụahịa ya abụghị ihe doro anya.

(2) Glue na resin version: n'oge ikpeazụ nke usoro ịkpụ waya diamond, a na-egbutu silicon wafer dị nso na njedebe na-abata n'ihu, The silicon wafer na njedebe njedebe ka ebipụbeghị, diamond nke mbụ ịkpụ. waya amalitela bee na roba oyi akwa na resin efere, Ebe ọ bụ na silicon mkpanaka gluu na resin osisi bụ ma epoxy resin ngwaahịa, Ya softening point bụ isi n'etiti 55 na 95 ℃, Ọ bụrụ na nro nro nke roba oyi akwa ma ọ bụ resin. efere dị ala, ọ nwere ike ikpo ọkụ ngwa ngwa n'oge a na-egbutu ma mee ka ọ dị nro ma gbazee, Ejikọtara ya na waya nchara na silicon wafer elu, Na-eme ka ike ịkpụ nke eriri diamond belata, ma ọ bụ na-anata ihe ndị na-esi ísì ụtọ na silicon. ntụ ntụ na resin, Ozugbo agbakwunyere, ọ na-esiri ike ịsacha, mmetọ dị otú ahụ na-emekarị n'akụkụ nsọtụ nke silicon wafer.

(3) silicon ntụ ntụ: na usoro nke diamond waya ọnwụ ga-emepụta ọtụtụ silicon ntụ ntụ, na ịcha, ngwa agha coolant ntụ ntụ ọdịnaya ga-adịwanye elu, mgbe ntụ ntụ bụ nnukwu ezuru, ga-rube isi na silicon elu. na diamond waya ọnwụ nke silicon ntụ ntụ size na size na-eduga ya mfe adsorption na silicon elu, na-eme ka o sie ike ọcha.Ya mere, hụ na mmelite na mma nke coolant ma belata ntụ ntụ na coolant.

(4) onye na-ehicha ihe: ndị na-emepụta waya diamond ugbu a na-ejikarị egbutu ngwa agha n'otu oge ahụ, na-emekarị ka ọ ghara ịmịcha ngwa ngwa, usoro nhicha na ihe nhicha, wdg, otu teknụzụ ịkpụ waya diamond site na usoro ịkpụ, na-etolite a. set zuru ezu nke ahịrị, coolant na ngwa agha ọnwụ nwere nnukwu ihe dị iche, otú kwekọrọ ekwekọ ihicha usoro, ihicha gị n'ụlọnga usoro onunu ogwu, usoro, wdg kwesịrị maka diamond waya ọnwụ na-eme ka kwekọrọ ekwekọ ukpụhọde.Nhicha gị n'ụlọnga bụ akụkụ dị mkpa, mbụ ihicha gị n'ụlọnga usoro surfactant, alkalinity adịghị adabara ihicha diamond waya ịcha silicon wafer, kwesịrị ịbụ n'ihi na elu nke diamond waya silicon wafer, ihe mejupụtara na elu residues nke ezubere iche ihicha gị n'ụlọnga, na-ewere na na usoro nhicha.Dị ka e kwuru n'elu, ihe mejupụtara nke defoaming gị n'ụlọnga adịghị mkpa na ngwa agha ịkpụ.

(5) Mmiri: ịcha waya diamond, ịsacha tupu mmiri na ihicha mmiri na-ejupụta nwere adịghị ọcha, enwere ike tinye ya n'elu ala nke silicon wafer.

Belata nsogbu nke ime ka ntutu velvet na-acha ọcha pụtara aro

(1) Iji coolant na ezigbo mgbasa ozi, na coolant na-achọrọ iji na-eji obere ihe fọdụrụ foaming gị n'ụlọnga iji belata ihe fọdụrụ nke coolant n'elu nke silicon wafer;

(2) Jiri gluu na efere resin dabara adaba iji belata mmetọ nke wafer silicon;

(3) A na-eji mmiri dị ọcha na-agbaze coolant iji hụ na ọ dịghị ihe dị mfe fọdụrụnụ na mmiri eji eme ihe;

(4) N'ihi na elu nke diamond waya bee silicon wafer, na-eji ọrụ na ihicha mmetụta ọzọ adabara ihicha gị n'ụlọnga;

(5) Jiri eriri diamond coolant online mgbake usoro iji belata ọdịnaya nke silicon ntụ ntụ na ịcha usoro, nke mere na n'ụzọ dị irè ịchịkwa nke fọdụrụ silicon ntụ ntụ na silicon wafer elu nke wafer.N'otu oge ahụ, ọ nwekwara ike ịbawanye mma nke mmiri ọkụ, mmiri na-asọpụta na oge na tupu ịsacha, iji hụ na a na-asacha ntụ ntụ silicon n'oge.

(6) Ozugbo a na-etinye silicon wafer na tebụl dị ọcha, a ghaghị ịgwọ ya ozugbo, ma mee ka mmiri na-ekpo ọkụ na-ekpo ọkụ n'oge usoro nhicha niile.

(7) The silicon wafer na-eme ka elu mmiri na usoro nke degumming, na ike nkụ ndammana.(8) N'ime usoro nhicha nke silicon wafer, oge a na-ekpughe na ikuku nwere ike ibelata dị ka o kwere mee iji gbochie mmepụta ifuru n'elu nke silicon wafer.

(9) Ndị ọrụ na-ehicha ihe agaghị akpọtụrụ elu nke silicon wafer ozugbo n'oge usoro nhicha niile, ma ga-eyi uwe mkpuchi roba, ka ọ ghara ịmepụta mbipụta mkpịsị aka.

(10) N'izo aka [2], njedebe batrị na-eji hydrogen peroxide H2O2 + alkali NaOH ihicha usoro dịka oke olu nke 1: 26 (3% NaOH ngwọta), nke nwere ike ibelata nsogbu ahụ nke ọma.Ụkpụrụ ya yiri ihe ngwọta SC1 (nke a na-akpọkarị mmiri mmiri 1) nke semiconductor silicon wafer.Isi usoro ya: ihe nkiri oxidation na silicon wafer n'elu na-emepụta site na oxidation nke H2O2, nke NaOH mebiri emebi, na oxidation na corrosion na-eme ugboro ugboro.Ya mere, ihe ndị ahụ na-ejikọta na ntụ ntụ silicon, resin, metal, wdg) na-adabakwa n'ime mmiri na-ehicha ihe na oyi akwa corrosion;n'ihi oxidation nke H2O2, ihe ndị dị na mbara igwe na-eme ka ọ bụrụ CO2, H2O ma wepụ ya.Usoro nhicha a bụ ndị na-emepụta silicon wafer na-eji usoro a hazie nhicha nke waya diamond ịcha monocrystalline silicon wafer, silicon wafer na anụ ụlọ na Taiwan na ndị na-emepụta batrị ndị ọzọ na-eji mkpesa nsogbu ọcha velvet.Enwekwara ndị na-emepụta batrị ejirila usoro nhicha velvet yiri nke ahụ, na-ejikwa nke ọma n'ọdịdị nke ọcha velvet.Enwere ike ịhụ na a na-agbakwunye usoro nhicha a na usoro nhicha silicon wafer iji wepụ ihe fọdụrụ na silicon wafer iji dozie nsogbu nke ntutu na-acha ọcha nke ọma na njedebe batrị.

mmechi

Ka ọ dị ugbu a, ịcha waya diamond aghọwo isi teknụzụ nhazi n'ọhịa nke otu kristal igbutu, ma na usoro nke na-akwalite nsogbu nke ime velvet ọcha na-enwe nsogbu silicon wafer na batrị na-emepụta batrị, na-eduga na batrị na-emepụta batrị diamond ịkpụ silicon waya. wafer nwere ụfọdụ nguzogide.Site na ntụle ntụle nke mpaghara ọcha, ọ na-emekarị site na ihe fọdụrụ n'elu nke silicon wafer.Iji gbochie nsogbu nke silicon wafer nke ọma na cell, akwụkwọ a na-enyocha ebe ndị nwere ike isi nweta mmetọ elu nke silicon wafer, yana atụmatụ nkwalite na usoro mmepụta.Dị ka ọnụ ọgụgụ, mpaghara na ọdịdị nke ntụpọ ọcha, enwere ike nyochaa ma melite ihe kpatara ya.A na-atụ aro ka iji hydrogen peroxide + alkali ihicha usoro.Ahụmahụ na-aga nke ọma egosila na ọ nwere ike igbochi nsogbu nke waya diamond ịkpụ silicon wafer na-eme ka velvet na-acha ọcha, maka ntụaka nke ndị na-emepụta ụlọ ọrụ n'ozuzu na ndị na-emepụta ihe.